4-dof Piezoelectric Microgripper Equipped with a Smart CMOS Camera.

This paper deals with the design of a micro-eye- in-hand architecture. It consists of a microcamera embedded on a gripper. The camera is a high speed (10 000 fps) CMOS sensor of 64 × 64 pixels. Each pixel measures 35 μm × 35 μm and includes a photodiode, an amplifier, two storage capacitors, and an analog arithmetic unit. The gripper is consists of a 4 dof (degrees-of-freedom) (y+, y-, z+, z-) microprehensile based on piezoelectric actuators. This eye-in-hand system will be used to perform automatic MEMS (micro-electro-mechanical systems) micromanipulation and microassembly tasks using a vision feed- back control.